Who Are We?

We provide customer and technical support to RF Plasma process based equipment manufacturers in Europe, offering expertise and engineering know-how on RF products developed by Adtec Plasma Technology in Japan.

In collaboration with the design team at our Head Office, we offer bespoke solutions, customizing RF Generators and/or Impedance Matching Units to the specification of your process.

Our European HQ is also dedicated, alongside our academic and professional research partners, to the design, application development and manufacturer of cold atmospheric pressure gas plasma products

Adtec Plasma Technology

Established in 1985 in Fukuyama, Japan, Adtec Plasma Technology orginially worked in the development and manufacture of various control boards. By early 1991, we had begun selling High Frequency Plasma Generation Equipment for semiconductor processes – this has remained the core of our business ever since, and we’re one of the World’s leading suppliers of RF Plasma products to the semiconductor and display industries.

Also based at Fukuyama Head Office, the Adtec Innovation department constantly strives to innovate and develop new technology, most notably within cold atmospheric pressure gas plasma technologies.

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What is Plasma?

Consider water. When you apply energy (generally heat) to a solid (ice), you get a liquid (water); apply further energy, you get a gas (steam). But what happens if you keep going?

Continue to apply energy (heat or charge) to a gas, and the matter will eventually became a plasma – hence Plasma’s title as the “4th State of Matter”. Here on Earth, Plasma can be found in the form of lightning, the Northern Lights, and the stuff in fluorescent lamps; in fact, Plasma is a fundamental state of matter, and it is believed that over 99% of the known Universe (think stars!) exists in this state!

The continued supply of energy used to generate plasma artifically is most often in the form of an electromagnetic field, and causes a breakdown of the atomic shells, resulting in a gas with net electric charge – in addition to negative free electrons, there are now, importantly, positive charged ions. Plasma can therefore be considered a charged, or ionized, gas.

As you might expect, incredibly high temperatures (thousands or even 10s of thousands of degrees C) are required to sustain this ionized state.
As such, the development of Non-Thermal (Cold) Plasma technologies is hugely exciting, and is an area Adtec specialise in. Incredibly, it is possible to generate a plasma that is safe to the human touch!

The term plasma refers to the partially ionized gaseous state consisting of molecules, atoms and ions in both ground and excited states, and electrons such that the concentration of positively and negatively charged species results in overall electrical neutrality.

The role of the electron in causing inonization and conduction and the nature of other charged species were established by the early 1990s. The word plasma was coined to denote the state of ionized gases formed in the electrical discharge.

Plasma are characterized by their electron density and the average electron energy. Two types of plasma are of most interest, these are “hot” and “cold” plasmas.

The “cold” plasma is a non-equilibrium plasma found in a glow discharge experiment characterized by electron densities in the range 10^9 – 10^12 cm^-3 with average electron energies of 1-10eV. The electron temperatures in these plasmas are some two orders of magnitude greater than the Boltzmann temperatures of the ions and molecules which are roughly ambient.

This is in contrast to the “hot” or equilibrium plasmas with similar electron densities. This class of plasma is characterized by a very high gas temperature which is approximately equal to the electron temperature.

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