We wanted to make rugged, reliable products – products that the user had full confidence in to deliver consistently, in the the toughest of environment. As critical dimensions and process windows shrink and the cost of down-time and scrapped product grows, it’s even more important today than it was then to have RF products that can take the strain that industry demands.
We wanted to make products that were rugged and reliable – products that the user had full confidence in to deliver consistently, in the toughest of environments. As critical dimensions and process windows shrink, and the cost of down-time grows, it is more important than ever to have RF products that can take the strain the industry demands. This goal remains at the core of everything we do. We are confident that we are continuing to deliver – all RF power products come with a 2 year warranty as standard.
Adtec RF Products are essential facilitators of plasma processes across Semiconductor, Flat-Panel, Data-Storage, MEMS, Solar, Sputter and Industrial Coatings.
RF Plasma Generators
Solid State linear amplified RF power supplies give superior power control and reliability, with less spurious noise. Careful component choice, coupled with our meticulous amplifier reduces strain, greatly increasing the MTBF. The stability of the amplifier gives greater scope to provide low-duty, microsecond pulsed RF, with superb control at outputs as low as 1W.
Durable and reliable design
300W to 30kW output
Rapid Arc Detection and Arc Suppression
Able to withstand high levels of reflected power
400kHz to 40.68MHz
Pulsed RF and Variable Frequency available
400kHz | 12.5MHz | 13.56MHz | 27.12MHz | 40.68MHz | |
300w | TX-03 | TX-03 | |||
500w | TXL005 | ||||
600w | TX-06 | TX-06 | TX-06 27M | ||
1kW | TX010 | TX-10 | TX-10 | TX-10 27M | |
1.5kW | TXL015-0800-57-1 | ||||
2kW | TX-20 | TX-20 | TX-20 27M | ||
3kW | TX-30 | TX-30 27M | |||
4kW | TX-4000 40M | ||||
5kW | TX-50, TS-05 | TX-5000 400 | |||
6kW | TX-6000 40M-400 | ||||
10kW | TS-10 | ||||
20kW | TS-20 | ||||
30kW | TS-30 |
This matrix is not exhaustive, and represents an overview of our product set. Please get in touch to discuss your exact requirements.
Impedance Matching Networks
Adtec specialise in custom built automatic impedance matching units. Every matching network is designed to the exact specifications of your chamber or process, ensuring a consistently fast and accurate match.
A stable match = A stable plasma
Automatic high-speed matching
Custom designed to your process
Durable and reliable design
High-quality components respond rapidly to load changes
A controlled, repeatable process
A consistently stable network
400kHz | 13.56MHz | 27.12MHz | 81.36MHz | |
300w | AMVG-300 | |||
600w | AMVG-600 | AMVG-600-81M | ||
1kW | AMVG-1000 | |||
1.5kW | RFSW-BOX-AA | |||
2kW | AMVG-2000 | |||
3kW | AMVG-3000 | AMVG-3000-27M | ||
5kW | AMVG-5000 | |||
10kW | AMVG-10000 | |||
15kW | AMVG-15000 | |||
20kW | AMVG-20000 |
This matrix is not exhaustive, and represents an overview of our product set. Please get in touch to discuss your exact requirements.
- Vp-p/vp sensor
- Vdc sensor
- Vdc arc detection
- Analogue RS-232C
- Profibus
- Adtec AMV Control Software
1 | AC Power on | Matching unit is idle and waits for RF power from the generator |
2 | RF Power on | Matching unit's sensor picks up the RF power signal and activates the automatic tuning mode. By adjusting CLOAD and CPHASE it finds the ignition point of the plasma - normally the highest point of VPP throughput to the reactor |
3 | Plasma Ignites | Matching unit tunes to the lowest reflected power point - normally where network impedance (ZM)+ the reactor impedance (ZC) is 50ohm |
4 | Plasma ignites | The matching unit monitors the power signals and automatically re-tunes the system when ZC changes |
5 | RF Power off | Matching unit returns to idling |
Tuning parameters are stored internally on the matching unit and by using the AMV Control Software, parameters can be modified to change the matching speed, start point (via presets), matching range, and many more. For troubleshooting it is also possible to switch the system between manual and automatic setting. The AMV Control Software can be used to monitor the capacitor positions, forward power, reflected power, Vpp and Vdc (depending on customer requests) from the matching unit.
Presets and monitoring can be done via analogue control/RS232 control/Profibus (depending on customer request) and the AMV Control Software.
Measuring Devices
Adtec’s RF Measuring Devices are ideal for chamber measurements, tool calibration, troubleshooting and process development – our range will help deepen your understanding of your RF processes.
Portable and convenient chamber analyser
Trace display of forward and reflected wave power
Power Meters
As well as performing as a standard RF Watt-meter for general fab or lab use, our AW-series RF power measurement products for tool calibration, troubleshooting, or process development can add an extra dimension to your understanding of RF process. With digital and graphical (vs. time) display of forward and reflected power, traceable to international measurement standards, the data can be stored on internal memory, exported to your PC, then shared with colleagues in reports or archives.
RF Network analyser
The ACA-100 is a portable vector network analyzer for medium frequencies which enables you to do impedance measurements where ever you go. It supports the following three impedance measurement modes:
1. Normal impedance/frequency mode.
2. Real time impedance measurement mode at a specified frequency. (Data point)
3. Impedance/Period mode at a specified frequency. (Network)
The ACA-100 is manufactured to the same robust and durable standard of all ADTEC's products. All the functions on the ACA-100 are controlled via the software and it has no internal adjustments. There are no trim pots or caps inside. All the calibration is done with the following software procedure.
This reduces maintenance costs because you do not need to return the unit for a yearly calibration. You only have to do the normal network analyzer calibration steps before you start.
- portable vector analyzer
- pc interface
- robust
- low maintenance
- Easy calibration
- N-type connecter
- Calibration set included
Model | ACA-100 |
Frequency control | D.D.S: 0.1 to 180MHz Stability: Stability ±30ppm |
Frequency Step Size | Measures impedance at any angle |
Calibration | Software Controlled (no screwdriver adjustments) |
ADC Resolution | 12 bits |
Impedance | 0.5Ω to 1kΩ |
Accuracy | 1Ω±3% of reading up to 60MHz, ±5% of reading up to 180MHz |
Phase Angle | ±90° |
Parameters Displayed | Magnitude of load impedance (|Z|)=(ZMag), |
RF-Sport | N, female |
RF Output | 20μW (max) |
Spurious Output | -30dBc or better |
Max Stray RF input while measuring | Maximum value 150mV (-6dBm) |
Max safe RF input | Maximum value 2V (+16dBm) |
PC Interface | RS232C |
Display | Graphics output on PC Screen |
Power Supply | DC 8 to 15V, 250mA max |
Dimensions | 135(W) x 142(D) x 46(H) mm (max) |
Others | Display Smith chart |
Warranty Period | 1 year |