When Adtec first started making RF Power products in 1990, our goal and core concept was to be world-leaders in the design and manufacture of Radio Frequency Plasma Generation equipment.
We wanted to make products that were rugged and reliable – products that the user had full confidence in to deliver consistently, in the toughest of environments. As critical dimensions and process windows shrink, and the cost of down-time grows, it is more important than ever to have RF products that can take the strain the industry demands. This goal remains at the core of everything we do. We are confident that we are continuing to deliver – all RF power products come with a 2 year warranty as standard.
Adtec RF Products are essential facilitators of plasma processes across Semiconductor, Flat-Panel, Data-Storage, MEMS, Solar, Sputter and Industrial Coatings.
RF Plasma Generators
Solid State linear amplified RF power supplies give superior power control and reliability, with less spurious noise. Careful component choice, coupled with our meticulous amplifier reduces strain, greatly increasing the MTBF. The stability of the amplifier gives greater scope to provide low-duty, microsecond pulsed RF, with superb control at outputs as low as 1W.
Durable and reliable design
300W to 30kW output
Rapid Arc Detection and Arc Suppression
Able to withstand high levels of reflected power
400kHz to 40.68MHz
Pulsed RF and Variable Frequency available
400kHz | 2MHz | 4MHz | 13.56MHz | 27.12MHz | 40.68MHz | 60MHz | |
300W | TX / TXR Series | ||||||
500W | TXL Series | ||||||
600W | TX / TXR Series | ||||||
800W | TXM Series | TXM Series | TXH Series | ||||
1000W | TXL Series | TX / TXR Series | |||||
1500W | TXL Series | ||||||
1600W | TXM Series | TXM Series | TXH Series | ||||
2000W | TXL Series | TX / TXR Series | |||||
2400W | TXM Series | ||||||
3000W | TXL Series | TX / TXR Series | TXH Series | ||||
3200W | TXM Series | ||||||
5000W | TXM Series | TX / TXR Series | |||||
10000W | TS Series | TX / TXR Series | |||||
20000W | TXR Series | ||||||
30000W | TS Series |
This matrix is not exhaustive, and represents an overview of our product set. Please get in touch to discuss your exact requirements.
Impedance Matching Networks
Adtec specialise in custom built automatic impedance matching units. Every matching network is designed to the exact specifications of your chamber or process, ensuring a consistently fast and accurate match.
A stable match = A stable plasma
Automatic high-speed matching
Custom designed to your process
Durable and reliable design
High-quality components respond rapidly to load changes
A controlled, repeatable process
A consistently stable network
400kHz | 13.56MHz | 27.12MHz | |
300W | AMVG Series | ||
500W | AMVS Series | ||
600W | AMVG / AMVS Series | ||
1kW | AMVS Series | AMVG / AMVS Series | |
2kW | AMVS Series | AMVG / AMVS Series | |
3kW | AMVG / AMVS Series | AMVG Series | |
5kW | AMVG Series | ||
10kW | AMVG Series | ||
15kW | AMVG Series | ||
20kW | AMVG / AMVS Series |
This matrix is not exhaustive, and represents an overview of our product set. Please get in touch to discuss your exact requirements.
- Vp-p/vp sensor
- Vdc sensor
- Vdc arc detection
- Analogue RS-232C
- Profibus
- Adtec AMV Control Software
1 | AC Power on | Matching unit is idle and waits for RF power from the generator |
2 | RF Power on | Matching unit's sensor picks up the RF power signal and activates the automatic tuning mode. By adjusting CLOAD and CPHASE it finds the ignition point of the plasma - normally the highest point of VPP throughput to the reactor |
3 | Plasma Ignites | Matching unit tunes to the lowest reflected power point - normally where network impedance (ZM)+ the reactor impedance (ZC) is 50ohm |
4 | Plasma ignites | The matching unit monitors the power signals and automatically re-tunes the system when ZC changes |
5 | RF Power off | Matching unit returns to idling |
Tuning parameters are stored internally on the matching unit and by using the AMV Control Software, parameters can be modified to change the matching speed, start point (via presets), matching range, and many more. For troubleshooting it is also possible to switch the system between manual and automatic setting. The AMV Control Software can be used to monitor the capacitor positions, forward power, reflected power, Vpp and Vdc (depending on customer requests) from the matching unit.
Presets and monitoring can be done via analogue control/RS232 control/Profibus (depending on customer request) and the AMV Control Software.
High Power RF Coaxial Switch Boxes
By including a Switch Box in your signal chain, it is possible to serve multiple processes with only one generator.
The switch serves as a pivot point, rapidly redirectly the RF from chamber to chamber
Vacuum Relay Switching
Custom designed to your process
Range of powers and frequencies available
Interlock prevents switching during RF output
Rapid switching time
Multiple RF outputs
Get in touch to discuss your requirements
Coaxial Cables
We can provide bespoke Coaxial Cabling
Get in touch to discuss your requirements