We wanted to make rugged, reliable products – products that the user had full confidence in to deliver consistently, in the the toughest of environment. As critical dimensions and process windows shrink and the cost of down-time and scrapped product grows, it’s even more important today than it was then to have RF products that can take the strain that industry demands.

We wanted to make products that were rugged and reliable – products that the user had full confidence in to deliver consistently, in the toughest of environments. As critical dimensions and process windows shrink, and the cost of down-time grows, it is more important than ever to have RF products that can take the strain the industry demands. This goal remains at the core of everything we do. We are confident that we are continuing to deliver – all RF power products come with a 2 year warranty as standard.

Adtec RF Products are essential facilitators of plasma processes across Semiconductor, Flat-Panel, Data-Storage, MEMS, Solar, Sputter and Industrial Coatings.

RF Plasma Generators

Solid State linear amplified RF power supplies give superior power control and reliability, with less spurious noise. Careful component choice, coupled with our meticulous amplifier reduces strain, greatly increasing the MTBF. The stability of the amplifier gives greater scope to provide low-duty, microsecond pulsed RF, with superb control at outputs as low as 1W.

Durable and reliable design

300W to 30kW output

Rapid Arc Detection and Arc Suppression

Able to withstand high levels of reflected power

400kHz to 40.68MHz

Pulsed RF and Variable Frequency available

400kHz

12.5MHz

13.56MHz

27.12MHz

40.68MHz

300w

TX-03

TX-03

500w

TXL005

600w

TX-06

TX-06

TX-06 27M

1kW

TX010

TX-10

TX-10

TX-10 27M

1.5kW

TXL015-0800-57-1

2kW

TX-20

TX-20

TX-20 27M

3kW

TX-30

TX-30 27M

4kW

TX-4000 40M

5kW

TX-50, TS-05

TX-5000 400

6kW

TX-6000 40M-400

10kW

TS-10

20kW

TS-20

30kW

TS-30

This matrix is not exhaustive, and represents an overview of our product set. Please get in touch to discuss your exact requirements.

Impedance Matching Networks

Adtec specialise in custom built automatic impedance matching units. Every matching network is designed to the exact specifications of your chamber or process, ensuring a consistently fast and accurate match.

A stable match = A stable plasma

Automatic high-speed matching

Custom designed to your process

Durable and reliable design

High-quality components respond rapidly to load changes

A controlled, repeatable process

A consistently stable network

400kHz

13.56MHz

27.12MHz

81.36MHz

300w

AMVG-300

600w

AMVG-600

AMVG-600-81M

1kW

AMVG-1000

1.5kW

RFSW-BOX-AA

2kW

AMVG-2000

3kW

AMVG-3000

AMVG-3000-27M

5kW

AMVG-5000

10kW

AMVG-10000

15kW

AMVG-15000

20kW

AMVG-20000

This matrix is not exhaustive, and represents an overview of our product set. Please get in touch to discuss your exact requirements.

Depending on a customer's need the following items can be added:
  • Vp-p/vp sensor
  • Vdc sensor
  • Vdc arc detection
Communication options that Adtec supply are:
  • Analogue RS-232C
  • Profibus
  • Adtec AMV Control Software

1

AC Power on

Matching unit is idle and waits for RF power from the generator

2

RF Power on

Matching unit's sensor picks up the RF power signal and activates the automatic tuning mode. By adjusting CLOAD and CPHASE it finds the ignition point of the plasma - normally the highest point of VPP throughput to the reactor

3

Plasma Ignites

Matching unit tunes to the lowest reflected power point - normally where network impedance (ZM)+ the reactor impedance (ZC) is 50ohm

4

Plasma ignites

The matching unit monitors the power signals and automatically re-tunes the system when ZC changes

5

RF Power off

Matching unit returns to idling

Tuning parameters are stored internally on the matching unit and by using the AMV Control Software, parameters can be modified to change the matching speed, start point (via presets), matching range, and many more. For troubleshooting it is also possible to switch the system between manual and automatic setting. The AMV Control Software can be used to monitor the capacitor positions, forward power, reflected power, Vpp and Vdc (depending on customer requests) from the matching unit.
Presets and monitoring can be done via analogue control/RS232 control/Profibus (depending on customer request) and the AMV Control Software.

Measuring Devices

Adtec’s RF Measuring Devices are ideal for chamber measurements, tool calibration, troubleshooting and process development – our range will help deepen your understanding of your RF processes.

Portable and convenient chamber analyser

Trace display of forward and reflected wave power

Power Meters

As well as performing as a standard RF Watt-meter for general fab or lab use, our AW-series RF power measurement products for tool calibration, troubleshooting, or process development can add an extra dimension to your understanding of RF process. With digital and graphical (vs. time) display of forward and reflected power, traceable to international measurement standards, the data can be stored on internal memory, exported to your PC, then shared with colleagues in reports or archives.

RF Network analyser

The ACA-100 is a portable vector network analyzer for medium frequencies which enables you to do impedance measurements where ever you go. It supports the following three impedance measurement modes:
1. Normal impedance/frequency mode.
2. Real time impedance measurement mode at a specified frequency. (Data point)
3. Impedance/Period mode at a specified frequency. (Network)

The ACA-100 is manufactured to the same robust and durable standard of all ADTEC's products. All the functions on the ACA-100 are controlled via the software and it has no internal adjustments. There are no trim pots or caps inside. All the calibration is done with the following software procedure.
This reduces maintenance costs because you do not need to return the unit for a yearly calibration. You only have to do the normal network analyzer calibration steps before you start.

  • portable vector analyzer
  • pc interface
  • robust
  • low maintenance
  • Easy calibration
  • N-type connecter
  • Calibration set included

Model

ACA-100

Frequency control

D.D.S: 0.1 to 180MHz Stability: Stability ±30ppm

Frequency Step Size

Measures impedance at any angle
1 Hz to 10MHz

Calibration

Software Controlled (no screwdriver adjustments)

ADC Resolution

12 bits

Impedance

0.5Ω to 1kΩ

Accuracy

1Ω±3% of reading up to 60MHz, ±5% of reading up to 180MHz

Phase Angle

±90°

Parameters Displayed

Magnitude of load impedance (|Z|)=(ZMag),
Phase angle of load impedance (θ)=(Theta),
Equivalent series resistance (Rs) and reactance (Xs), Equivalent parallel resistance (Rq) and reactance (Xp), Reactance is shown as inductance (μH) or capacitance (pF) according to the phase angle.

RF-Sport

N, female

RF Output

20μW (max)

Spurious Output

-30dBc or better

Max Stray RF input while measuring

Maximum value 150mV (-6dBm)

Max safe RF input

Maximum value 2V (+16dBm)

PC Interface

RS232C
Data Rate: 57.6k or 115k baud
USB/RS232C Converter is supplied with ACA-100

Display 

Graphics output on PC Screen
Mouse controlled cursor for digital parametric readout

Power Supply

DC 8 to 15V, 250mA max

Dimensions

135(W) x 142(D) x 46(H) mm (max)

Others

Display Smith chart
Possible to set chamber RF input terminal as calibration point using coaxial cable and tools
Calibration kit included

Warranty Period

1 year