DC Power Supplies

Acquired by the Adtec group in 2004, IDX has been delivering DC Power solutions in 1969.

Experts in high power DC, IDX generators can be found in Particle Accelerators, including the KEK Particle Accelerator in Japan and in CERN.

With thousands of IDX generators in the field, Adtec is now launching our first DC Power Supply for Sputtering Deposition

Bipolar Power Supply

With a variety of pulse modes, and high speed arc detection and handling capabilities, Adtec's 20kW Bipolar DC Power Supply can be stacked to facilitate a flexible and high power Sputtering Deposition system

Durable and reliable design

20kW Output

Combine multiple units to achieve higher powers

10kW model coming soon!

Continuous, Pulsed & Bipolar DC Modes

High Speed Arc Detection & Handling

+/- 1000V rectangular wave

Get in touch to discuss your requirements

Electrostatic Chuck Power Supply

High voltage power supply for electrostatic chuck equipped with polarity reversal and forced grounding functions

  • High voltage output ± 10kV
  • Digital communication (RS-232C), with analog output monitor (voltage, current)
  • Reliable protection circuit against discharge, short circuit, overload, etc. on the load side
  • Use with an external dedicated RF filter box to protect the power supply from RF noise

Get in touch to discuss your requirements


Concentrating Solar Power

Concentrating Solar Power

Concentrating Solar Power (CSP) plants generate electricity by concentrating sunlight onto a focal point. CSP plants are generally located in desert regions – consequently, the mirrors used to reflect and focus the sunlight get soiled with sand and dust, and thus require regular cleaning. The current method simply uses water and brushes; however, water is a scare and precious resource in such arid terrains.

Plasma Cleaning of the mirrors may offer an alternative, water-free solution.

In collaboration with researchers at Cranfield University, we are developing our Air Plasma technology to explore the characteristics of a novel atmospheric pressure plasma system for the reduction of water use in the cleaning of CSP mirrors.

The Global CSP market was valued at over $3bn in 2016, with growth of 13% anticipated by 2025. The development of an appropriate and effective atmospheric plasma system will be a disruptive and game-changing technology for the CSP market.

With the M-CCMD affixed to a robotic arm, and a CSP mirror to soil and process, we are able to perform experiments using a lab-based setup that accurately recreates how this method of cleaning may occur in situ on a CSP plant. With the air plasma both removing residue and creating a self-cleaning surface, the results are not only fascinating, but hugely promising.

The 4 Quadrants on the result seen here demonstrate clearly and powerfully the benefits an air plasma process has on a sample.

Top Left: Soiled, processed, Top Right: Soiled, unprocessed, Bottom Left: Not soiled, processed, Bottom Right: Not soiled, not processed

→ Successful cleaning of the mirror → A hydrophilic surface has been achieved → A hydrophilic surface = a self-cleaning surface

Our paper "Cleaning Concentrating Solar Power Mirrors Without Water" has been published in American Institute of Physics

Read the full paper here

Contact

Europe


    America




      Surface Treatments

      • Plasma treatment may help to improve bonding for metal plates.
      • Stainless steel treated with plasma was tested by TWI to improve wet etching.

      • Carbon contamination is removed from surface.
      • XPS result shows Carbon contamination on SUS surface is reduced by plasma treatment

      Steel Plate

      Cold Atmospheric can be used to increase the surface energy of a material, a characteristic fantastically demonstrated by this clip of water preferentially sticking to the treated area of this steel plate

      Gortex

      Cold Atmospheric Plasma has a strong and remarkable ability to increase the wettability of a material – this allows us to bond materials that were previously impossible to join

      Antimicrobial

      Broad spectrum and with a phyisical mode of action, resistance is unlikely. Gas plasma has proven santistation efficacy for disinfection and hygiene applications. 3 min treatment can reduce 109 order bacterial load. 2 min treatment of biofilm reduces microbial load by 50% on 24H biofilm. No micro-organisms detected after 5min plasma treatment of 24h and 72 h cultivated biofilms

      Medical

      Adtec first introduced our gas plasma technology to the Max Planck Institute in 2004 leading to a joint development in plasma medicine. The MicroPlaSter plasma medical device was the first device to be used in clinical trials worldwide for infection management of wounds and surgical site infections. With over 9 years of scientific and clinical research, Adtec's microwave powered argon plasma medical device has been proven to be safe for clinical use. The same technology is now used in the Adtec SteriPlas medical device adopted for use in infection management by hospitals in Europe.


      RF Plasma Generation

      When Adtec first started making RF Power products in 1990, our goal and core concept was to be world-leaders in the design and manufacture of Radio Frequency Plasma Generation equipment.

      We wanted to make products that were rugged and reliable – products that the user had full confidence in to deliver consistently, in the toughest of environments. As critical dimensions and process windows shrink, and the cost of down-time grows, it is more important than ever to have RF products that can take the strain the industry demands. This goal remains at the core of everything we do. We are confident that we are continuing to deliver – all RF power products come with a 2 year warranty as standard.

      Adtec RF Products are essential facilitators of plasma processes across Semiconductor, Flat-Panel, Data-Storage, MEMS, Solar, Sputter and Industrial Coatings.

      RF Plasma Generators

      Solid State linear amplified RF power supplies give superior power control and reliability, with less spurious noise. Careful component choice, coupled with our meticulous amplifier reduces strain, greatly increasing the MTBF. The stability of the amplifier gives greater scope to provide low-duty, microsecond pulsed RF, with superb control at outputs as low as 1W.

      Durable and reliable design

      300W to 30kW output

      Rapid Arc Detection and Arc Suppression

      Able to withstand high levels of reflected power

      400kHz to 40.68MHz

      Pulsed RF and Variable Frequency available

      400kHz

      2MHz

      4MHz

      13.56MHz

      27.12MHz

      40.68MHz

      60MHz

      300W

      TX / TXR Series

      500W

      TXL Series

      600W

      TX / TXR Series

      800W

      TXM Series

      TXM Series

      TXH Series

      1000W

      TXL Series

      TX / TXR Series

      1500W

      TXL Series

      1600W

      TXM Series

      TXM Series

      TXH Series

      2000W

      TXL Series

      TX / TXR Series

      2400W

      TXM Series

      3000W

      TXL Series

      TX / TXR Series

      TXH Series

      3200W

      TXM Series

      5000W

      TXM Series

      TX / TXR Series

      10000W

      TS Series

      TX / TXR Series

      20000W

      TXR Series

      30000W

      TS Series

      This matrix is not exhaustive, and represents an overview of our product set. Please get in touch to discuss your exact requirements.

      Impedance Matching Networks

      Adtec specialise in custom built automatic impedance matching units. Every matching network is designed to the exact specifications of your chamber or process, ensuring a consistently fast and accurate match.

      A stable match = A stable plasma

      Automatic high-speed matching

      Custom designed to your process

      Durable and reliable design

      High-quality components respond rapidly to load changes

      A controlled, repeatable process

      A consistently stable network

      400kHz

      13.56MHz

      27.12MHz

      300W

      AMVG Series

      500W

      AMVS Series

      600W

      AMVG / AMVS Series

      1kW

      AMVS Series

      AMVG / AMVS Series

      2kW

      AMVS Series

      AMVG / AMVS Series

      3kW

      AMVG / AMVS Series

      AMVG Series

      5kW

      AMVG Series

      10kW

      AMVG Series

      15kW

      AMVG Series

      20kW

      AMVG / AMVS Series

      This matrix is not exhaustive, and represents an overview of our product set. Please get in touch to discuss your exact requirements.

      Depending on a customer's need the following items can be added:

      • Vp-p/vp sensor
      • Vdc sensor
      • Vdc arc detection

      Communication options that Adtec supply are:

      • Analogue RS-232C
      • Profibus
      • Adtec AMV Control Software

      1

      AC Power on

      Matching unit is idle and waits for RF power from the generator

      2

      RF Power on

      Matching unit's sensor picks up the RF power signal and activates the automatic tuning mode. By adjusting CLOAD and CPHASE it finds the ignition point of the plasma - normally the highest point of VPP throughput to the reactor

      3

      Plasma Ignites

      Matching unit tunes to the lowest reflected power point - normally where network impedance (ZM)+ the reactor impedance (ZC) is 50ohm

      4

      Plasma ignites

      The matching unit monitors the power signals and automatically re-tunes the system when ZC changes

      5

      RF Power off

      Matching unit returns to idling

      Tuning parameters are stored internally on the matching unit and by using the AMV Control Software, parameters can be modified to change the matching speed, start point (via presets), matching range, and many more. For troubleshooting it is also possible to switch the system between manual and automatic setting. The AMV Control Software can be used to monitor the capacitor positions, forward power, reflected power, Vpp and Vdc (depending on customer requests) from the matching unit.
      Presets and monitoring can be done via analogue control/RS232 control/Profibus (depending on customer request) and the AMV Control Software.

      High Power RF Coaxial Switch Boxes

      By including a Switch Box in your signal chain, it is possible to serve multiple processes with only one generator.

      The switch serves as a pivot point, rapidly redirectly the RF from chamber to chamber

      Vacuum Relay Switching

      Custom designed to your process

      Range of powers and frequencies available

      Interlock prevents switching during RF output

      Rapid switching time

      Multiple RF outputs

      Get in touch to discuss your requirements

      Measuring Devices

      Adtec’s RF Measuring Devices are ideal for chamber measurements, tool calibration, troubleshooting and process development – our range will help deepen your understanding of your RF processes.

      Portable and convenient chamber analyser

      Trace display of forward and reflected wave power

      Power Meters

      As well as performing as a standard RF Watt-meter for general fab or lab use, our AW-series RF power measurement products for tool calibration, troubleshooting, or process development can add an extra dimension to your understanding of RF process. With digital and graphical (vs. time) display of forward and reflected power, traceable to international measurement standards, the data can be stored on internal memory, exported to your PC, then shared with colleagues in reports or archives.

      RF Network analyser

      The ACA-100 is a portable vector network analyzer for medium frequencies which enables you to do impedance measurements where ever you go. It supports the following three impedance measurement modes:
      1. Normal impedance/frequency mode.
      2. Real time impedance measurement mode at a specified frequency. (Data point)
      3. Impedance/Period mode at a specified frequency. (Network)

      The ACA-100 is manufactured to the same robust and durable standard of all ADTEC's products. All the functions on the ACA-100 are controlled via the software and it has no internal adjustments. There are no trim pots or caps inside. All the calibration is done with the following software procedure.
      This reduces maintenance costs because you do not need to return the unit for a yearly calibration. You only have to do the normal network analyzer calibration steps before you start.

      • portable vector analyzer
      • pc interface
      • robust
      • low maintenance

      • Easy calibration
      • N-type connecter
      • Calibration set included

      Model

      ACA-100

      Frequency control

      D.D.S: 0.1 to 180MHz Stability: Stability ±30ppm

      Frequency Step Size

      Measures impedance at any angle
      1 Hz to 10MHz

      Calibration

      Software Controlled (no screwdriver adjustments)

      ADC Resolution

      12 bits

      Impedance

      0.5Ω to 1kΩ

      Accuracy

      1Ω±3% of reading up to 60MHz, ±5% of reading up to 180MHz

      Phase Angle

      ±90°

      Parameters Displayed

      Magnitude of load impedance (|Z|)=(ZMag),
      Phase angle of load impedance (θ)=(Theta),
      Equivalent series resistance (Rs) and reactance (Xs), Equivalent parallel resistance (Rq) and reactance (Xp), Reactance is shown as inductance (μH) or capacitance (pF) according to the phase angle.

      RF-Sport

      N, female

      RF Output

      20μW (max)

      Spurious Output

      -30dBc or better

      Max Stray RF input while measuring

      Maximum value 150mV (-6dBm)

      Max safe RF input

      Maximum value 2V (+16dBm)

      PC Interface

      RS232C
      Data Rate: 57.6k or 115k baud
      USB/RS232C Converter is supplied with ACA-100

      Display 

      Graphics output on PC Screen
      Mouse controlled cursor for digital parametric readout

      Power Supply

      DC 8 to 15V, 250mA max

      Dimensions

      135(W) x 142(D) x 46(H) mm (max)

      Others

      Display Smith chart
      Possible to set chamber RF input terminal as calibration point using coaxial cable and tools
      Calibration kit included

      Warranty Period

      1 year

      Coaxial Cables

      We can provide bespoke Coaxial Cabling

      Get in touch to discuss your requirements


      Technical Support

      Repair

      Our in-house repair centre at Adtec's European HQ in West London enables quick and efficient repairs with Adtec stocked parts. Skilled and trained electrical engineers will examine the functionality of units, professionally assessing the repair cost and time, as well as any parts needed. Units are calibrated and thoroughly tested, and if applicable, a firmware update carried out. All repaired parts come with a 3 month warranty from the shipment date

      Overhaul

      We can give new life to old equipment by replacing old, worn out parts with Adtec qualified parts. Units are calibrated to their original specification. Thorough test procedures and a 3 month warranty are included.

      Maintenance

      Our Engineers will perform a health check on units using a rigorous points based inspection.
      Calibration is performed where necessary. Generators are fine tuned to perform optimally in all power ranges, and matching unit networks are fine tuned to factory standard.

      Key Points

      • Fast turn-around time
      • Adtec qualified parts
      • Full calibration
      • Rigorous testing
      • Latest firmware update
      • 3 months repair warranty
      • On-site maintenance
      • On-site health check
      • Matching network calibration

      Get in touch to find out more


      Cold Plasma Technology

      What is Cold Plasma?

      A cold plasma is a plasma that exists in a state of non-equilibrium. In contrast to a hot plasma, the temperature of the electrons is a cold plasma is some two orders of magnitude greater than the temperature of the ions and molecules, whose temperature is roughly ambient. The result is that these plasmas can exist at as low as 30°C! In fact, they are completely safe to touch!

      Cold Plasma Products

      At Adtec, we are passionate about Plasma Technology; specifically non-thermal atmospheric pressure gas microwave powered plasma (gas plasma). This technology was first developed in the Innovation department of our parent company in Japan and we at Adtec Europe are commercializing this technology.

      Over the years, we have been involved in a number of research projects, investigating the merits of Plasma Technology in various industries. Our portfolio consists of two core technologies, designed, developed and manufactured at Adtec Europe. Non-thermal (also called cold plasma) has many different applications including surface treatment, cleaning and antimicrobial treatments. We look forward to collaborating with partners to develop new applications for plasma technology.

      Microwave Induced Gas Plasma

      Content coming soon!

      PlasmaTact

      Plasma Tact is robust and portable cold atmospheric plasma system, ideally suited to a variety of surface treatments.

      Using Argon or Helium gas, the reliable microwave generator produces a consistent and stable plasma, perfect for repeatable processing in both research and manufacturing applications.

      More info

      Dielectric Barrier Discharge Air Plasma

      Dielectric Barrier Discharge (DBD) is a hugely flexible method of plasma generation. With an adaptable and scalable electrode array design, our M-CCMD is a unique and versatile system.
      The ability to generate a plasma out the air around us provides the basis for surface treatment technology of unrivalled flexibility and convenience.

      M-CCMD – Air Plasma Technology

      The M-CCMD is an adaptable and scalable device that generates a non-thermal Air Plasma via Dielectric Barrier Discharge (DBD). With no need for a vacuum chamber or external gas supply, air plasma systems open a new and unparalleled world of plasma processing possibilities. This technology has the potential to be deployed anywhere there’s air!

      More info

      We are proud to be developing our DBD Air Plasma technology in collaboration with researchers at the world-renowned Cranfield University, UK. With the M-CCMD affixed to a robot arm, we are exploring atmospheric pressure plasma as a method of cleaning concentrating solar power mirrors.

      Learn more

      About us

      Who Are We?

      We provide customer and technical support to RF Plasma process based equipment manufacturers in Europe, offering expertise and engineering know-how on RF products developed by Adtec Plasma Technology in Japan.

      In collaboration with the design team at our Head Office, we offer bespoke solutions, customizing RF Generators and/or Impedance Matching Units to the specification of your process.

      Our European HQ is also dedicated, alongside our academic and professional research partners, to the design, application development and manufacturer of cold atmospheric pressure gas plasma products

      Adtec Plasma Technology

      Established in 1985 in Fukuyama, Japan, Adtec Plasma Technology orginially worked in the development and manufacture of various control boards. By early 1991, we had begun selling High Frequency Plasma Generation Equipment for semiconductor processes – this has remained the core of our business ever since, and we’re one of the World’s leading suppliers of RF Plasma products to the semiconductor and display industries.

      Also based at Fukuyama Head Office, the Adtec Innovation department constantly strives to innovate and develop new technology, most notably within cold atmospheric pressure gas plasma technologies.

      Visit our Head Office

      What is Plasma?

      Consider water. When you apply energy to a solid (ice), you get a liquid (water); apply further energy, you get a gas (steam). But what happens if you keep going?

      Continue to apply energy (heat or charge) to a gas, and the matter will eventually became a plasma – hence Plasma’s title as the “4th State of Matter”. Here on Earth, Plasma can be found in the form of lightning, the Northern Lights, and the stuff in fluorescent lamps; in fact, Plasma is a fundamental state of matter, and it is believed that over 99% of the known Universe (think stars!) exists in this state!

      The continued supply of energy used to generate plasma artificially is most often in the form of an electromagnetic field. This causes a breakdown of the atomic shells and electrons disassociate from the nucleus. In addition to unbound negative electrons, there are now, importantly, positive charged ions. Plasma can therefore be considered a charged, or ionized, gaseous state. It is electrically neutral and highly conductive.

      Plasmas are characterized by their electron density and the average electron energy; broadly, we can speak of “hot” and “cold” plasmas.

      The development of Non-Thermal (Cold) Plasma technologies is hugely exciting, and is an area Adtec specialise in. Incredibly, it is possible to generate a plasma that is safe to the human touch!

      Learn more

      Adtec is a member of The European Research Association for Thin Films eV (EFDS)

      Full Story

      Adtec is a member of NMI - Champion for the UK Electronic Manufacturing Industry

      Full Story

      News


      Home

      The Plasma Specialists

      We are Adtec, specialists in RF Plasma Generation and Cold Plasma Technologies.

      A simple Cold Atmospheric Plasma treatment produces a hydrophilic region on a Gortex sheet

      RF Plasma Generation

      World-leading design and manufacture of Radio Frequency Power products – our Head Office in Japan has been producing RF Plasma equipment since 1990

      Find out more

      What is Plasma?

      Solid ⇒ Liquid ⇒ Gas ⇒ Plasma
      Learn all about the 4th State of Matter!

      Find out more

      Cold Plasma Technology

      Adtec is at the cutting edge of atmospheric cold plasma R&D.
      With patented Microwave Plasma and innovative Dielectric Barrier Discharge technologies, we are always excited to welcome new partners

      Find out more

      About us

      We are Adtec Europe. Based in London, we are the European HQ of Adtec Plasma Technology, Japan. We are Plasma Technology Specialists, with presence in Europe, the USA, and across the Far East

      Find out more